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XMPS-208 Probe Station

XMPS-208 | 8-INCH MANUAL PROBE STATION

NEW RELEASE

Chuck Size

8-Inch

Leakage

fA Level

Frequency Range

DC to THz

Manual Station Model: XMPS-208

XMPS-208

8-Inch Manual Probe Station

The XMPS-208 is an 8-inch manual probe station designed to streamline chip-level characterization. It enables DC to THz measurements with a professional 3-axis upgrade architecture, ensuring leakage accuracy down to the fA level for precise I-V/C-V testing.

Key Specifications

  • Travel: 210mm x 210mm (X/Y)
  • Resolution: < 2 μm (High-Res System)
  • Chuck: 8-inch Multi-hole Vacuum
  • Microscope: 400X Continuous Zoom
Datasheet

Precision Chip Characterization.

The XMPS-208 offers a complete low-noise I-V/C-V testing solution. Its professional three-axis upgrade architecture enables I-V leakage measurements down to the fA level.

Featuring an 8-inch multi-hole adsorptive chuck, it improves compatibility and contact stability for thin-wafer testing. The system supports upgrades for high/low temperature environments and modular expansions for Load-Pull, Terahertz, and 1/f noise systems.

High Precision

X/Y accuracy ≤ 2.0 μm with full-stroke displacement modules.

Versatile Chuck

Quick switch between 8"/6"/4"/4mm area adsorption.

APPLICATIONS

  • Chip CharacterizationStreamlined DC to THz measurements.
  • Low-Noise TestingI-V/C-V testing with fA level leakage accuracy.
  • Thin-Wafer TestingStable contact for delicate wafers.

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