XMU-5422 Four-Channel High-Precision Source Measure Unit

The XMU-5422 provides four source-and-measure channels with four-quadrant operation in one 3U, 4 HP PXIe module. The XMU-5422 ±24 V voltage range combines with 20 µV resolution for precision device characterization, and its 10 µA current range provides 10 pA programming and measurement resolution. The XMU-5422 600 kSa/s sampling rate supports automated characterization and transient-oriented test workflows, and Windows and Linux support with a VISA-based DLL integrates the module into modular test systems.

XMU-5422 application areas also cover measurement support for power-electronic devices and power-supply design, multi-channel electrical characterization for semiconductor research workflows, and source and measurement functions for materials and biochemical research. The XMU-5422 was sold as XMU5201A until the 19 August 2026 renumbering, with the hardware unchanged.

On the XMU-5422, gate and junction leakage, photodiode dark current and insulation resistance read near the bottom of the 10 µA range. That range programs and measures in 10 pA steps, with ±(0.025% + 1.5 nA) accuracy at 23 °C ± 5 °C. The 1.5 nA offset, not the percentage term, is what a leakage figure really rests on. The next range up, 100 µA, resolves 100 pA instead. On the voltage side, 20 µV steps pair with ±(0.015% + 1.2 mV) over the ±24 V span. The 1.2 mV offset still rules at low set points, so what improves is bias repeatability.

At 10 pA the fixture usually sets the floor before the module does. Guard the low lead, keep cable movement out of the run and let the device settle. Noise is quoted peak-to-peak from 0.1 Hz to 10 Hz, which is drift, not bandwidth. Accept the unit against the 10 µA range with the input open and guarded.